Knight Campus Semicoductor Process Tooling Installation

We performed installation and site preparation for five semiconductor processing tools and ancillary support equipment.

Our scope included process pumps and chillers, process gas abatement unit, process cooling water (PCW) system, and gas cabinets and panels to support the processing tools. This work took place in the existing semiconductor lab and clean rooms. The design was not well coordinated, so we worked closely with the engineer of record to redesign each system and routing to facilitate installation of new tooling in the existing space.